Clean Robot Product List and Ranking from 6 Manufacturers, Suppliers and Companies

3-Axis Cylindrical Coordinate Clean Robot SCR3000CS Series

It is suitable for wafer transport in semiconductor manufacturing equipment, inspection devices, etc.

The SCR3000CS series of three-axis cylindrical coordinate clean robots for super clean rooms is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. Depending on the equipment layout, you can choose between base type and flange type, and the S-curve acceleration and deceleration control allows for high-speed and high-precision wafer transport. For more details, please contact us or refer to the catalog.

Company：ジェーイーエル
Price：Other

Transport and handling robots
Other industrial robots
Clean Robot

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3-Axis Cylindrical Coordinate Clean Robot SCR3100S-PM Series

By reducing the footprint, the equipment layout can be downsized.

The Super Clean Room 3-Axis Cylindrical Coordinate Clean Robot SCR3100S series is suitable for transporting small-diameter wafers within semiconductor manufacturing equipment and inspection devices, thanks to its reduced footprint, allowing for a more compact equipment layout. You can choose between base type and flange type according to your equipment layout. For more details, please contact us or refer to the catalog.

Company：ジェーイーエル
Price：Other

Transport and handling robots
Other industrial robots
Clean Robot

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2-Axis Cylindrical Coordinate Clean Robot SSCR2090S Series

It features an energy-saving design using a full-axis stepping motor.

The SSCR2090S series of super clean room two-axis cylindrical coordinate clean robots is suitable for transporting small-diameter wafers inside semiconductor manufacturing equipment, inspection equipment, and LED manufacturing equipment, thanks to its reduced footprint and lightweight design, allowing for a more compact equipment layout. Each axis retains the specifications of higher-end models, including encoders, latch-type solenoid valves, and pressure switches with digital displays. For more details, please contact us or refer to the catalog.

Company：ジェーイーエル
Price：Other

Transport and handling robots
Other industrial robots
Clean Robot

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3-Axis Cylindrical Coordinate Clean Robot SSCR3115S Series

Suitable for small wafer transport, allowing for a compact device layout.

The SSCR3115S series of 3-axis cylindrical coordinate clean robots for super clean rooms is suitable for transporting small-diameter wafers inside semiconductor manufacturing equipment, inspection equipment, and LED manufacturing equipment, thanks to its reduced footprint and lightweight design, allowing for a more compact equipment layout. It is compatible with the SSCR2090S-PM and can be modified to have a link arm specification or a Z-axis-less specification. For more details, please contact us or refer to the catalog.

Company：ジェーイーエル
Price：Other

Transport and handling robots
Other industrial robots
Clean Robot

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3-Axis Cylindrical Coordinate Clean Robot SHR3000 Series

It is possible to choose between base type and flange type according to the device layout.

The SHR3000 series of 3-axis cylindrical coordinate robots for super clean rooms is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. You can choose between base type and flange type according to the equipment layout. The S-curve acceleration and deceleration control allows for high-speed and high-precision transport of wafers. It is possible to accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

Company：ジェーイーエル
Price：Other

Transport and handling robots
Other industrial robots
Clean Robot

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4-axis cylindrical coordinate clean robot STHR4000 series

It is suitable for wafer transport and allows for quick wafer exchange.

The STHR4000 series of super clean room 4-axis cylindrical coordinate twin-arm robots is suitable for wafer transport in semiconductor manufacturing equipment and inspection devices. The two arms allow for quick wafer exchanges. You can choose between base type and flange type to match the equipment layout. S-curve acceleration and deceleration control enables high-speed and high-precision wafer transport. It is possible to accommodate optimal chucks tailored to the transported objects and equipment layout. For more details, please contact us or refer to the catalog.

Company：ジェーイーエル
Price：Other

Transport and handling robots
Other industrial robots
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4-axis horizontal multi-joint clean robot GCR4000-PM series

Optimal for wafer transport in semiconductor manufacturing equipment and inspection devices compatible with 300mm.

The GCR4000-PM series is a multi-axis type, 4-axis horizontal articulated clean robot suitable for wafer transport within semiconductor manufacturing equipment and inspection devices that accommodate 300mm. It is possible to choose between base type and flange type according to the equipment layout. It can be equipped with optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

Company：ジェーイーエル
Price：Other

Transport and handling robots
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5-axis horizontal multi-joint clean robot GTCR5000-AM series

While it is a single arm, it maintains the functionality of a twin arm.

The GTCR5000 series is a 5-axis horizontal multi-joint clean robot compatible with 300mm, which ensures the functionality of a twin arm while being a single arm by incorporating a twin chuck. It is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices that accommodate 300mm. Depending on the equipment layout, you can choose between a base type and a flange type. It is possible to accommodate with optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

Company：ジェーイーエル
Price：Other

Transport and handling robots
Other industrial robots
Clean Robot

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4-axis horizontal multi-joint clean robot GCR4280-AM series

Ideal for transporting wafers and other items within semiconductor manufacturing equipment compatible with 300mm and 450mm.

The multi-axis type for super clean rooms, the 4-axis horizontal articulated clean robot GCR4280-AM series, is suitable for transporting wafers, small glass substrates, and other items within semiconductor manufacturing equipment and inspection devices, compatible with 300mm and 450mm sizes. You can choose between base type and flange type according to the equipment layout. It is possible to accommodate optimal chucks tailored to the items being transported and the equipment layout. For more details, please contact us or refer to the catalog.

Company：ジェーイーエル
Price：Other

Transport and handling robots
Other industrial robots
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Clean Robot "STHR4000 Series"

A twin-arm robot optimal for wafer transport in semiconductor manufacturing equipment!

The "STHR4000 Series" is a four-axis cylindrical coordinate clean robot designed for super clean rooms. Equipped with two arms, it enables quick wafer exchanges and is primarily suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. Additionally, our company offers a variety of clean robots, so please feel free to consult us. 【Features】 - Arm variations available in two sizes: 95mm and 156mm - Z-axis variations available in 200mm and 300mm - Load capacity is 3kgf or less when calculated at the third joint of the arm - Adoption of twin arms reduces wafer exchange time - Base type and flange type can be selected according to the equipment layout *For more details, please refer to the catalog or feel free to contact us.

Company：ジェーイーエル
Price：Other

Other conveying devices
Other factory equipment and parts
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Clean Robot "SWHR3156 Series"

A waterproof clean robot ideal for wafer transport in acidic and alkaline environments!

The "SWHR3156 series" is a waterproof clean robot with a 3-axis cylindrical coordinate system, equipped with a flip and edge grip function, compatible with 300mm wafers. It has an IP64 protection rating and is suitable for wafer transport in acidic and alkaline atmospheres during the LSI manufacturing process. We also offer a variety of clean robots, so please feel free to consult us. 【Features】 - Arm variation: 156mm - Z-axis variation: 200mm and 300mm - Load capacity: 3kgf or less, calculated at the third joint of the arm - The arm section is coated with Teflon for corrosion resistance - The arm joint structure uses V seals for waterproofing *For more details, please refer to the catalog or feel free to contact us.

Company：ジェーイーエル
Price：Other

Other conveying devices
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Clean Robot "SCR3100S-PM Series"

A clean robot that allows for miniaturization of device layout!

The "SCR3100S-PM series" is a three-axis cylindrical coordinate clean robot designed for super clean rooms. Its small footprint makes it suitable for transporting small-diameter wafers within semiconductor manufacturing equipment and inspection devices, allowing for a more compact equipment layout. We also offer a variety of clean robots, so please feel free to consult with us. 【Features】 - Arm variation: 100mm - Z-axis variation: 200mm and 300mm - Load capacity: 0.5kgf or less at the third joint of the arm - Base type and flange type can be selected according to the equipment layout - Equipped with a motion monitor *For more details, please refer to the catalog or feel free to contact us.

Company：ジェーイーエル
Price：Other

Other conveying devices
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Clean Robot

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Clean Robot 'SSCR3115S Series'

A clean robot that achieves a small footprint and lightweight design!

The "SSCR3115S series" is a three-axis cylindrical coordinate clean robot designed for super clean rooms. It allows for a compact device layout. Additionally, due to its small footprint and lightweight design, it is ideal for transporting small wafers inside semiconductor manufacturing equipment, inspection equipment, and LED manufacturing equipment. We also offer a variety of clean robots, so please feel free to consult us. 【Features】 - Maximum load capacity is 0.2 kgf or less at the third joint of the arm (work only) - Equipped with a motion monitor - Control methods include RS232C and parallel photo I/O - All axes use two-phase stepping motors - High-speed and high-precision wafer transport through S-curve acceleration and deceleration control *For more details, please refer to the catalog or feel free to contact us.

Company：ジェーイーエル
Price：Other

Other conveying devices
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Clean Robot "SCR3000CS Series"

A clean robot that is optimal for wafer transport in semiconductor manufacturing equipment, such as inspection devices!

The "SCR3000CS Series" is a three-axis cylindrical coordinate clean robot designed for super clean rooms. It is suitable for wafer transport within semiconductor equipment and inspection devices, and can accommodate optimal chucks tailored to the transported items and equipment layout. Additionally, our company offers a variety of clean robots, so please feel free to consult us. 【Features】 - Arm variations: 100mm, 130mm, 160mm, 200mm - Z-axis variations: selectable from 200mm onwards - Maximum load capacity: 3kgf or less based on the third joint of the arm - Equipped with operation monitoring - Control methods: RS232C and parallel photo I/O *For more details, please refer to the catalog or feel free to contact us.

Company：ジェーイーエル
Price：Other

Other conveying devices
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Clean Robot "STCR4000S Series"

A clean robot suitable for wafer transport in semiconductor manufacturing equipment and inspection devices!

The "STCR4000S Series" is a four-axis cylindrical coordinate clean robot designed for super clean rooms. With its two arms, it enables quick wafer exchanges. It is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. We also offer a variety of clean robots, so please feel free to consult with us. 【Features】 ■ Arm variations can be selected from 100mm and above ■ Z-axis variations can be selected from 200mm and above ■ Load capacity is 3kgf or less based on the third joint of the arm ■ Adoption of twin arms reduces wafer exchange time ■ Base type and flange type can be selected according to the equipment layout *For more details, please refer to the catalog or feel free to contact us.

Company：ジェーイーエル
Price：Other

Inspection robot
Clean Robot

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Yamaha Clean Single-Axis Robot C10

High-precision and high-thrust intermediate model added to the lineup of single-axis robot FILP-XC type Expanding the selection of clean robots, Yamaha Clean Single-axis Robot C10 【Features】 ○ High Precision Repetition positioning accuracy of ±0.01mm, ensuring the same level of precision as conventional products ○ Easy Maintenance Despite its built-in structure, components like servo motors and ball screws can be replaced individually, making maintenance smooth ○ Excellent Operability Inherits the ease of use and operability of traditional Yamaha controllers Allows utilization of program assets, programming boxes, and sharing with computers ○ High Load Capacity and High Thrust Achieves high specifications with a maximum load capacity of 60kg and maximum rated thrust of 339N ○ Standard adoption of complete absolute system eliminates the need for home return operation ○ Cleanliness level of CLASS 10 at 0.1μm base per 1cf Utilizes highly durable stainless steel sheets ● For other functions and details, please download the catalog.

Company：ヤマハ発動機ロボティクス事業部
Price：Other

Other industrial robots
Clean Robot

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Labor-saving robot / Clean robot [Yamazen TFS]

Ideal for electronic components, food, and medical device-related work in clean rooms!

Contributing to the automation and labor-saving of production systems in clean rooms A lineup of single-axis, Cartesian, and SCARA robots ● Clean SCARA Robot YK-XGC/XC Type ● Clean Single-Axis Robot FLIP-XC Type, SSC Type ● Clean Cartesian Robot XY-XC Type For more details, please download and view the catalog.

Company：山善
Price：Other

SCARA Robot
Clean Robot

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[Case Study: Pharmaceuticals] Introduction of achievements in pharmaceutical manufacturing.

With rich experience and specially designed robots, we have gained a lot of trust as specialists in automation.

Stobri has accumulated extensive know-how by collaborating with industry players over many years. This benefits our customers in the planning of all new projects, including mass filling and packaging processes for liquid agents, powders, and solid dosage forms used in the manufacture of active pharmaceutical ingredients (APIs) and biopharmaceuticals, as well as the production of packaging materials and containers, and lab automation systems and assembly lines. With our extensive experience and a lineup of specially designed robots, we have gained significant trust as specialists in automation. 【Solutions Tailored to Individual Needs】 ■ Research and development and production of active pharmaceutical ingredients (APIs) ■ Production of liquid agents and solid dosage forms ■ Materials and containers ■ Auxiliary processes ■ Biotherapy ■ Lab automation *For more details, please refer to the PDF materials or feel free to contact us.

Company：ストーブリ
Price：Other

Chemicals
Contract manufacturing
Clean Robot

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Tabletop Single-Arm Clean Robot 'AR1300-220'

Significantly contributes to the reduction of CO2 emissions during operation! Ultra-compact clean robot.

The AR1300-220 is an ultra-compact, lightweight tabletop single-arm clean robot. It can build a tabletop system for transporting conventional sorters and inspection devices. To reduce the size of the controller, the motor driver can be stored in the bottom of the robot. 【Features】 ■ The motor driver can be stored in the bottom of the robot ■ Significantly contributes to the reduction of CO2 emissions during operation ■ Board holding: Wafer is vacuum suctioned ■ Equipped with various sensors ■ Equipped with a two-phase pulse motor with an encoder ■ Dedicated command control via RS232C *For more details, please refer to the PDF materials or feel free to contact us.

Company：アテル
Price：Other

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Tabletop Double-Arm Clean Robot 'AR2300-220'

Low power consumption under 100W! The transport arm adopts a unique compact and lightweight multi-stage sliding mechanism.

The "AR2300-220" is a tabletop wafer transport device equipped with functions similar to conventional clean robots. It adopts a unique compact and lightweight multi-stage slide mechanism for the transport arm. By reducing the weight of the rotation and vertical axes, it achieves a simple structure with a mass of less than one-third compared to conventional models. 【Features】 ■ Achieves a mass of less than one-third compared to conventional models ■ Cleanliness measures: unique structure that sucks air from the side of the lower cover ■ Achieves low power consumption of less than 100W ■ Dedicated command control via RS232C ■ Equipped with a two-phase pulse motor with an encoder *For more details, please refer to the PDF document or feel free to contact us.

Company：アテル
Price：Other

Other inspection equipment and devices
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Direct Drive Single Arm Clean Robot 'HR1400-720'

The motor can be equipped with a reduction gear! The controller is a 5-axis specification clean robot.

The "HR1400-720" is a linear single-arm clean robot equipped with an AC servo motor of the absolute encoder type for all axes. The motor can be equipped with a reduction gear. Control methods can be selected from RS232C, I/O, and Ethernet. 【Features】 ■ Equipped with various sensors ■ Controller is 5-axis specification ■ Control method: RS232C ■ I/O and Ethernet can be selected ■ Equipped with an AC servo motor of the absolute encoder type for all axes *For more details, please refer to the PDF document or feel free to contact us.

Company：アテル
Price：Other

Other inspection equipment and devices
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Transport and handling robots
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Link-type double-arm cleaning robot 'PR2111-60'

Reduce manufacturing costs by increasing the sheet metal ratio and simplifying the structure! Link-type clean robot.

The PR2111-60 is a link-type double-arm clean robot equipped with various sensors. By increasing the sheet metal ratio and simplifying the structure compared to our conventional products, we achieve a reduction in manufacturing costs. It is equipped with a vacuum suction type ceramic chuck. 【Features】 ■ All axes use 2-phase stepping motors ■ Chuck: Ceramic chuck (vacuum suction type) optional ■ Equipped with various sensors ■ Reduction in manufacturing costs by increasing the sheet metal ratio and simplifying the structure *For more details, please refer to the PDF materials or feel free to contact us.

Company：アテル
Price：Other

Other inspection equipment and devices
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Transport and handling robots
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Link-type single-arm cleaning robot 'SR1160-310'

Full-axis 2P stepping motor specifications! Link-type single-arm clean robot.

The SR1160-310 is a link-type single-arm clean robot with a hand that can rotate 180°. The hand section comes with a rotary unit. It can accommodate other wafer size hands by replacing the mounting block. As an option, various sensors for positioning and air pressure confirmation are available. 【Features】 ■ Hand: KUMADE FORK KMWF-12SF ■ The hand section includes a rotary unit ■ Various sensors included (positioning, air pressure confirmation) *optional ■ All axes are equipped with 2P stepping motors ■ Hand can rotate 180° *For more details, please refer to the PDF document or feel free to contact us.

Company：アテル
Price：Other

Other inspection equipment and devices
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Vacuum-Compatible Single-Arm Clean Robot 'SV1240'

Achieved further reduction in manufacturing costs by reducing the number of parts in conventional aluminum structures!

The "SV1240" is a single-arm clean robot that employs a magnetic fluid seal and a metal bellows method for its vacuum seal. By reducing the number of conventional aluminum structural components, further manufacturing cost reductions have been achieved. It uses a belt link system with a timing belt for arm drive. 【Features】 ■ Equipped with a 2-phase pulse motor with an encoder ■ RS232C communication control ■ Parallel I/O control ■ Adopts a magnetic fluid seal and metal bellows method for the vacuum seal ■ Belt link system using a timing belt for arm drive *For more details, please refer to the PDF document or feel free to contact us.

Company：アテル
Price：Other

Other inspection equipment and devices
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Link-type single-arm cleaning robot "PR2000 Series"

Introducing a clean robot that increases the sheet metal ratio and simplifies the structure, achieving reduced manufacturing costs!

The "PR2000 Series" is a link-type single-arm clean robot that achieves manufacturing cost reduction by increasing the sheet metal ratio and simplifying the structure compared to our conventional products. It features a 2-phase stepping motor for all axes and is equipped with various sensors. If you are looking for a link-type single-arm clean robot, please feel free to consult us. 【Features】 ■ 2-phase stepping motor for all axes ■ Equipped with various sensors ■ Chuck: Ceramic chuck (vacuum suction type) option *For more details, please refer to the PDF materials or feel free to contact us.

Company：アテル
Price：Other

Other inspection equipment and devices
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Transport and handling robots
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Cylindrical Coordinate Clean Robot "PHT-R-4"

Supports atmospheric transport of wafers! The main unit weighs approximately 47 kg and the controller weighs about 8 kg.

The "PHT-R-4" is a horizontal multi-joint wafer transport robot designed for use in clean rooms. It is capable of moving in the front and back (X-axis), rotating (θ-axis), moving up and down (Z-axis), and hand rotation (0 to 180 degrees), making it suitable for transporting wafers in the atmosphere. The drive motor is an AC servo motor with absolute encoder specifications for all axes. 【Product Overview (Excerpt)】 ■ Installation Environment: Inside clean rooms (ambient temperature 10 to 35 degrees, humidity below 70% RH) ■ Arm: Single arm (Material: Aluminum, CFRP, Ceramic) ■ Load Capacity: 3 kg (total weight of hand base, hand, and work) *For more details, please refer to the PDF document or feel free to contact us.

Company：PHT
Price：Other

Transport and handling robots
Clean Robot

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JEL Product Comprehensive Catalog

This is a comprehensive catalog featuring a wide range of products, including semiconductor transport robots and aligners.

In the comprehensive product catalog of JEL, we feature a variety of transport robot products, including cylindrical coordinate clean robots, horizontal multi-joint clean robots, and cylindrical coordinate vacuum-compatible clean robots. The 3-axis cylindrical coordinate clean robot "SCR3000CS" is designed for super clean rooms and is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. You can choose between base type and flange type according to the equipment layout, and it is equipped with an operation monitor. The 4-axis horizontal multi-joint clean robot "GCR4000-PM" is a multi-axis type for super clean rooms. It is suitable for wafer transport in semiconductor manufacturing equipment and inspection devices that accommodate 300 mm wafers, using two-phase stepping motors with absolute encoders on all axes. S-curve acceleration and deceleration control, along with motion trajectory optimization, enable high-speed and high-precision wafer transport. For more details, please contact us or download the catalog.

Company：ジェーイーエル
Price：Other

Substrate transport device (loader/unloader)
Transport and handling robots
Clean Robot

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4-axis cylindrical coordinate clean robot STCR4000S series

The exchange of wafers can be done in a short time with two arms.

The Super Clean Room 4-axis cylindrical coordinate clean robot STCR4000S series is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. It allows for quick wafer exchanges with its two arms. It has obtained CE marking certification. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

Company：ジェーイーエル
Price：Other

Transport and handling robots
Other industrial robots
Clean Robot

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3-Axis Cylindrical Coordinate Clean Robot MCR3000C Series

It offers superior cost performance compared to conventional MHR.

The MCR3000C series, compatible with 300mm for super clean rooms, is suitable for wafer transport in semiconductor manufacturing equipment and inspection devices. It enables high-speed transport with all-axis AC servo, offering superior cost performance compared to conventional MHR models. You can choose between base type and flange type to match your equipment layout. It is possible to accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

Company：ジェーイーエル
Price：Other

Transport and handling robots
Other industrial robots
Clean Robot

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4-axis cylindrical coordinate clean robot MTCR4000 series

It is suitable for wafer transport and enables high-speed transport using all-axis AC servos.

The MTCR4000 series, compatible with 300mm for super clean rooms, is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. It enables high-speed transport with full-axis AC servos, offering superior cost performance compared to conventional MTHR models. You can choose between base type and flange type according to your equipment layout. It is possible to accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

Company：ジェーイーエル
Price：Other

Transport and handling robots
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Clean Robot Product List and Ranking from 6 Manufacturers, Suppliers and Companies | IPROS GMS

Clean Robot Manufacturer, Suppliers and Company Rankings

Clean Robot Product ranking